Platinum and gold diffusion monitor vacancy profiles...

phys stat sol (a) 2013 / 04 Vol. 210; Iss. 4

Platinum and gold diffusion monitor vacancy profiles induced into silicon wafers by aluminum alloying

Abdelbarey, D., Kveder, V., Schröter, W., Seibt, M.
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Volume:
210
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201300020
Date:
April, 2013
File:
PDF, 451 KB
english, 2013
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