Static response and stiction analysis of MEMS...

Physica status solidi 2015 / 12 Vol. 12; Iss. 12

Static response and stiction analysis of MEMS micromembranes for optical applications

Pustan, Marius, Dudescu, Cristian, Birleanu, Corina
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Volume:
12
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201510096
Date:
December, 2015
File:
PDF, 1.05 MB
english, 2015
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