Phase resolved measurement of anisotropic electron velocity distribution functions in a radio-frequency discharge
Crintea, D L, Luggenhölscher, D, Kadetov, V A, Isenberg, Ch, Czarnetzki, UVolume:
41
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/8/082003
Date:
April, 2008
File:
PDF, 419 KB
english, 2008