Controlled misfit dislocation technology in strained...

Semiconductor Science and Technology 2006 / 01 Vol. 21; Iss. 1

Controlled misfit dislocation technology in strained silicon MOSFETs

Wu, San Lein, Wang, Yen Ping, Chang, Shoou Jinn
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Volume:
21
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/21/1/008
Date:
January, 2006
File:
PDF, 247 KB
english, 2006
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