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A MEMS inertial switch with a single circular mass for universal sensitivity
Cao, Yun, Xi, Zhanwen, Yu, Pingxin, Wang, Jiong, Nie, WeirongVolume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/10/105005
Date:
October, 2015
File:
PDF, 3.37 MB
english, 2015