Detection and formation mechanism of micro-defects in...

Chinese Physics B 2016 / 01 Vol. 25; Iss. 1

Detection and formation mechanism of micro-defects in ultrafine pitch Cu—Cu direct bonding

Liu, Zi-Yu, Cai, Jian, Wang, Qian, Chen, Yu
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Volume:
25
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/25/1/018103
Date:
January, 2016
File:
PDF, 1.22 MB
english, 2016
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