Silicon microcantilevers with different actuation-readout...

Journal of Physics Conference Series 2008 / 03 Vol. 100; Iss. 9

Silicon microcantilevers with different actuation-readout schemes for absolute pressure measurement

Bianco, S, Cocuzza, M, Ferrante, I, Giuri, E, Pirri, C F, Ricci, A, Scaltrito, L, Bich, D, Merialdo, A, Schina, P, Correale, R
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Volume:
100
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/100/9/092008
Date:
March, 2008
File:
PDF, 1.17 MB
english, 2008
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