Novel BF$^{+}$ Implantation for High Performance Ge pMOSFETs
Hsu, William, Kim, Taegon, Chou, Harry, Rai, Amritesh, Banerjee, Sanjay K.Year:
2016
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2016.2578327
File:
PDF, 265 KB
english, 2016