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[IEEE 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2016.5.16-2016.5.19)] 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Inline electrical yield versus optical inspection: Correlations, connections and disconnections
Zheng, Fan, Salvador, Dave, Gow, Cathy, Kermel, Lori, Rhoads, Bryan, Zhang, Kan, Pan, Xiao, Stahl, Ben, Davies, William, Tessier, Amanda, Crawford, Edward, Sheraw, Rebekah, Ahsan, Ishtiaq, Engel, BretYear:
2016
Language:
english
DOI:
10.1109/asmc.2016.7491094
File:
PDF, 560 KB
english, 2016