[IEEE IEEE 7th International Conference on Properties and...

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[IEEE IEEE 7th International Conference on Properties and Applications of Dielectric Materials - Nagoya, Japan (1-5 June 2003)] Proceedings of the 7th International Conference on Properties and Applications of Dielectric Materials (Cat. No.03CH37417) - Investigation of fluorocarbon thin films as dielectric materials for electronic applications

Gonon, P., Sylvestre, A., Bustarret, E.
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Volume:
1
Year:
2003
Language:
english
DOI:
10.1109/icpadm.2003.1218360
File:
PDF, 276 KB
english, 2003
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