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[IEEE 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Beijing, China (Oct. 18-21, 2004)] Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - A comparison study of high-density MIM capacitors with ALD HfO/sub 2/-Al/sub 2/O/sub 3/ laminated, sandwiched and stacked dielectrics
Shi-Jin Ding,, Hu, H., Chunxiang Zhu,, Kim, S.J., Li, M.F., Cho, B.J., Chin, A., Kwong, D.-L.Volume:
1
Year:
2004
Language:
english
DOI:
10.1109/icsict.2004.1435035
File:
PDF, 750 KB
english, 2004