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[IEEE 2007 IEEE International Electron Devices Meeting - Washington, DC, USA (2007.12.10-2007.12.12)] 2007 IEEE International Electron Devices Meeting - Process Technology - Advanced Process & Integration Technology
De Salvo, Barbara, Lee, Tze-LiangYear:
2007
Language:
english
DOI:
10.1109/iedm.2007.4419035
File:
PDF, 44 KB
english, 2007