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[IEEE 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Xi'an, China (2015.4.7-2015.4.11)] 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - The effect of micro-spring stiffness changes on the typical MEMS S&A device
Wang Dakui,, Lou Wenzhong,, Xiong Yongjia,, Wang Fufu,, Liu Fangyi,, Jin Xin,, Lu Jun,Year:
2015
Language:
english
DOI:
10.1109/nems.2015.7147456
File:
PDF, 506 KB
english, 2015