SPIE Proceedings [SPIE Micro92 - San Jose, CA (Monday 9 March 1992)] Optical/Laser Microlithography V - Shape effects of edge-line phase shifter on light intensity contrast
Nakatani, Mitsunori, Nakano, Hirofumi, Kusunose, Haruhiko, Kamon, Kazuya, Matsuda, Shuichi, Watakabe, Yaichiro, Takano, Hirozo, Otsubo, Mutuyuki, Cuthbert, John D.Volume:
1674
Year:
1992
Language:
english
DOI:
10.1117/12.130350
File:
PDF, 1.28 MB
english, 1992