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SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography - Imaging Schwarzschild multilayer x-ray microscope
Hoover, Richard B., Baker, Phillip C., Shealy, David L., Gore, David B., Walker II, Arthur B. C., Barbee, Jr., Troy W., Kerstetter, Ted, Hoover, Richard B., Walker II, Arthur B. C.Volume:
1742
Year:
1993
Language:
english
DOI:
10.1117/12.140596
File:
PDF, 831 KB
english, 1993