SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Advanced Techniques for Integrated Circuit Processing II - In-situ spectral ellipsometry for real-time thickness measurement and control
Henck, Steven A., Duncan, Walter M., Loewenstein, Lee M., Kuehne, John, Bondur, James A., Castleman, Gary, Harriott, Lloyd R., Turner, Terry R.Volume:
1803
Year:
1993
Language:
english
DOI:
10.1117/12.142925
File:
PDF, 673 KB
english, 1993