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SPIE Proceedings [SPIE Applications in Optical Science and Engineering - Boston, MA (Sunday 15 November 1992)] Industrial Applications of Optical Inspection, Metrology, and Sensing - Laser gage using chirped synthetic wavelength interferometry
de Groot, Peter J., McGarvey, John A., Brown, Gordon M., Harding, Kevin G., Stahl, H. PhilipVolume:
1821
Year:
1993
Language:
english
DOI:
10.1117/12.145530
File:
PDF, 284 KB
english, 1993