SPIE Proceedings [SPIE Microelectronic Processing '93 -...

  • Main
  • SPIE Proceedings [SPIE Microelectronic...

SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Multilevel Interconnection: Issues That Impact Competitiveness - Simulations of metallization uniformity from large planar sputtering targets

Bouchard, Fred, Manring, W. A., Hoang, Hoang H., Schutz, Ron, Bernstein, Joseph B., Vasquez, Barbara
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
2090
Year:
1993
Language:
english
DOI:
10.1117/12.156528
File:
PDF, 400 KB
english, 1993
Conversion to is in progress
Conversion to is failed