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SPIE Proceedings [SPIE SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 11 July 1993)] Miniature and Micro-Optics and Micromechanics - Dry etching: path to coherent refractive microlens arrays
Stern, Margaret B., Rubico Jay, Theresa, Gallagher, Jr., Neal C., Roychoudhuri, ChandrasekharVolume:
1992
Year:
1993
Language:
english
DOI:
10.1117/12.165699
File:
PDF, 828 KB
english, 1993