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SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - Application of RTA to a 0.8-μm BiCMOS process
Reuss, Robert H., Bondur, James A., Elliott, Kiefer, Hauser, John R., Kwong, Dim-Lee, Ray, Asit K.Volume:
2091
Year:
1994
Language:
english
DOI:
10.1117/12.167345
File:
PDF, 704 KB
english, 1994