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SPIE Proceedings [SPIE SPIE's 1994 Symposium on Microlithography - San Jose, CA (Sunday 27 February 1994)] Integrated Circuit Metrology, Inspection, and Process Control VIII - Thermal design methodology of hot and chill plates for photolithography
DeWitt, David P., Niemoeller, T. C., Mack, Chris A., Yetter, Gil, Bennett, Marylyn H.Volume:
2196
Year:
1994
Language:
english
DOI:
10.1117/12.174144
File:
PDF, 712 KB
english, 1994