SPIE Proceedings [SPIE SPIE's 1994 Symposium on Microlithography - San Jose, CA (Sunday 27 February 1994)] Advances in Resist Technology and Processing XI - Identification of diazonaphthoquinone esters of polyhydroxybenzophenone compounds
DiCarlo, John, Evans, O. B., Fedyk, J., Ficner, Stanley A., Khadim, Mohammad A., Dammel, Ralph R., Nalamasu, OmkaramVolume:
2195
Year:
1994
Language:
english
DOI:
10.1117/12.175383
File:
PDF, 472 KB
english, 1994