SPIE Proceedings [SPIE SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 24 July 1994)] Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics - Bremsstrahlung optical monitoring system (BOMS) for in situ spectral characterization and optical film thickness monitoring of electron beam evaporated x-ray coatings and multilayers: design concept

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