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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI - III-V access waveguides using atomic layer deposition

Mnaymneh, Khaled, Frédérick, Simon, Dalacu, Dan, Lapointe, Jean, Poole, Philip J., Williams, Robin L., von Freymann, Georg, Schoenfeld, Winston V., Rumpf, Raymond C.
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Volume:
8613
Year:
2013
Language:
english
DOI:
10.1117/12.2004310
File:
PDF, 380 KB
english, 2013
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