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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Optical Microlithography XXVII - Hybrid inverse lithography techniques for advanced hierarchical memories
Lai, Kafai, Erdmann, Andreas, Xiao, Guangming, Hooker, Kevin, Irby, Dave, Zhang, Yunqiang, Ward, Brian, Cecil, Tom, Hall, Brett, Lee, Mindy, Kim, Dave, Lucas, KevinVolume:
9052
Year:
2014
Language:
english
DOI:
10.1117/12.2048022
File:
PDF, 3.58 MB
english, 2014