SPIE Proceedings [SPIE 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014) - Harbin, China (Saturday 26 April 2014)] 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Surface quality of silicon wafer improved by hydrodynamic effect polishing
Yang, Li, Ruch, Eric, Li, Shengyi, Peng, Wenqiang, Guan, Chaoliang, Li, ShengyiVolume:
9281
Year:
2014
Language:
english
DOI:
10.1117/12.2068621
File:
PDF, 569 KB
english, 2014