SPIE Proceedings [SPIE Microelectronic Manufacturing '95 -...

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SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Microelectronic Device and Multilevel Interconnection Technology - Integral contact process in submicron technology

Lee, Yu-Hua, Tsui, Bing-Yue, Chen, Ih-Chin, Dixit, Girish A., Doan, Trung T., Sasaki, Nobuo
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Volume:
2636
Year:
1995
Language:
english
DOI:
10.1117/12.221136
File:
PDF, 1.07 MB
english, 1995
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