SPIE Proceedings [SPIE SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, CA (Sunday 9 July 1995)] Electron-Beam Sources and Charged-Particle Optics - Improvement of sensitivity and depth resolution in conventional RBS and ERDA techniques using energy/momentum filters
Ishibashi, Kiyotaka, Furukawa, Yukito, Yokoyama, Kazushi, Inoue, Ken-ichi, Patnaik, Bijoy K., Parikh, Nalin R., Munro, Eric, Freund, Henry P.Volume:
2522
Year:
1995
Language:
english
DOI:
10.1117/12.221582
File:
PDF, 343 KB
english, 1995