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SPIE Proceedings [SPIE Photonics East '95 - Philadelphia, PA (Sunday 22 October 1995)] Microrobotics and Micromechanical Systems - Miniaturized surface-driven electrostatic positioners
Gao, Robert X., Fang, Ji, Warrington, Jr., Robert O., Parker, Lynne E.Volume:
2593
Year:
1995
Language:
english
DOI:
10.1117/12.228649
File:
PDF, 363 KB
english, 1995