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SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II - Multifractal point defect clusters in subsurface damaged layer of semiconductor wafers
Fedtchouk, Alexander P., Rudenko, Ruslana A., Fedtchouk, A. A., Keshavarzi, Ali, Prasad, Sharad, Hartmann, Hans-DieterVolume:
2874
Year:
1996
Language:
english
DOI:
10.1117/12.250845
File:
PDF, 476 KB
english, 1996