SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Microelectronic Device and Multilevel Interconnection Technology II - Copper metallization for on-chip interconnects
Gelatos, A. V., Nguyen, Bich-Yen, Perry, Kathleen A., Marsh, R., Peschke, J., Filipiak, Stanley M., Travis, Edward O., Thompson, Matthew A., Saaranen, T., Tobin, Phil J., Mogab, C. J., Chen, Ih-Chin,Volume:
2875
Year:
1996
Language:
english
DOI:
10.1117/12.250884
File:
PDF, 613 KB
english, 1996
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