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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachining and Microfabrication Process Technology II - Eutectic bonds on wafer scale by thin film multilayers
Christensen, Carsten, Bouwstra, Siebe, Pang, Stella W., Chang, Shih-ChiaVolume:
2879
Year:
1996
Language:
english
DOI:
10.1117/12.251228
File:
PDF, 154 KB
english, 1996