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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachining and Microfabrication Process Technology II - Commercializing MEMS--too fast or too slow?
Walsh, Steven T., Carr, William N., Mados, Hillary, Narang, Divjot S., Pang, Stella W., Chang, Shih-ChiaVolume:
2879
Year:
1996
Language:
english
DOI:
10.1117/12.251234
File:
PDF, 814 KB
english, 1996