SPIE Proceedings [SPIE Photomask Japan '97 - Kawasaki City, Japan (Thursday 17 April 1997)] Photomask and X-Ray Mask Technology IV - Advanced mask metrology system for up to 4-Gb DRAM
Ototake, Taro, Matsubara, Eiji, Hosoi, Keiichi, Aizaki, NaoakiVolume:
3096
Year:
1997
Language:
english
DOI:
10.1117/12.277269
File:
PDF, 332 KB
english, 1997