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SPIE Proceedings [SPIE ISMA '97 International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 23 June 1997)] Microlithographic Techniques in IC Fabrication - Footing reduction in the organic bottom antireflective coating implementation
Ko, Tze-Man, Cheng, Alex, Yoon, Soon Fatt, Yu, Raymond, Mack, Chris A.Volume:
3183
Year:
1997
Language:
english
DOI:
10.1117/12.280540
File:
PDF, 2.03 MB
english, 1997