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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachining and Microfabrication Process Technology III - Single-sided multilevel structure for silicon pressure transducers by masked-maskless etching technology
Yang, Heng, Ren, Jianjun, Bao, Minhang, Shen, Shaoqun, Chang, Shih-Chia, Pang, Stella W.Volume:
3223
Year:
1997
DOI:
10.1117/12.284479
File:
PDF, 399 KB
1997