SPIE Proceedings [SPIE Optoelectronics and High-Power Lasers & Applications - San Jose, CA (Saturday 24 January 1998)] Laser Applications in Microelectronic and Optoelectronic Manufacturing III - Organic molecular beam deposition combined with laser-induced chemical reactions
Fuchigami, Hiroyuki, Nakao, Yukiyasu, Tanimura, Sachiko, Uehara, Yasushi, Kurata, Tetsuy, Tsunoda, Sei, Niino, Hiroyuki, Yabe, Akira, Dubowski, Jan J., Dyer, Peter E.Volume:
3274
Year:
1998
Language:
english
DOI:
10.1117/12.309524
File:
PDF, 1.55 MB
english, 1998