SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Microfluidic Devices and Systems - Micromachining technologies for miniaturized communication devices
Nguyen, Clark T., Frazier, A. Bruno, Ahn, Chong H.Volume:
3515
Year:
1998
Language:
english
DOI:
10.1117/12.322084
File:
PDF, 2.72 MB
english, 1998