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SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II - Compact FTIR wafer-state sensors: a new way of in-line ULSI characterization
Yakovlev, Victor A., Bosch-Charpenay, Sylvie, Richter, Matthew, Rosenthal, Peter A., Solomon, Peter R., Xu, Jiazhan, Ajuria, Sergio A., Hossain, Tim Z.Volume:
3509
Year:
1998
Language:
english
DOI:
10.1117/12.324422
File:
PDF, 1.09 MB
english, 1998