SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Integration of SnO2 sol-gel processes to gas sensor microfabrication: H2 and CO sensitivity evaluation
Cobianu, Corbel, Iorgulescu, Raluca, Savaniu, Cristian, Dima, Antonela, Dascalu, Dan C., Siciliano, Pietro, Capone, Simona, Rella, Roberto, Quaranta, Fabio, Vasanelli, Lorenzo, Courtois, Bernard, CrarVolume:
3680
Year:
1999
Language:
english
DOI:
10.1117/12.341188
File:
PDF, 2.45 MB
english, 1999