SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - CFD-ACE+: a CAD system for simulation and modeling of MEMS
Stout, Phillip J., Yang, H. Q., Dionne, Paul, Leonard, Andy, Tan, Zhiqiang, Przekwas, Andrzej J., Krishnan, Anantha, Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, Karam, JeVolume:
3680
Year:
1999
Language:
english
DOI:
10.1117/12.341217
File:
PDF, 5.48 MB
english, 1999