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SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - New method to design halftone mask for the fabrication of continuous microrelief structure
Su, Jingqin, Du, Jinglei, Yao, Jun, Gao, Fuhua, Guo, Yongkang, Cui, Zheng, Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, Karam, Jean Michel, Markus, Karen W.Volume:
3680
Year:
1999
Language:
english
DOI:
10.1117/12.341286
File:
PDF, 1.17 MB
english, 1999