SPIE Proceedings [SPIE Optoelectronics '99 - Integrated Optoelectronic Devices - San Jose, CA (Saturday 23 January 1999)] Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI - Multifunctional microscope: design and construction of a full-field nonhomogeneous surface analysis metrology tool
Chang, Hsin-hua, Chu, Fei-Hung, Lee, Chih-Kung, Lee, Chau-Hwang, Cindrich, Ivan, Lee, Sing H., Sutherland, Richard L.Volume:
3633
Year:
1999
Language:
english
DOI:
10.1117/12.349314
File:
PDF, 1.72 MB
english, 1999