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SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Electronics and Structures for MEMS - Novel fiber-to-waveguide coupling method using silicon-on-insulator micromachining techniques
Ngo, Nam Quoc, Rosa, Michel A., Sweatman, Denis R., Dimitrijev, Sima, Harrison, H. Barry, Titmarsh, Andrew, Bergmann, Neil W., Reinhold, Olaf, Tien, Norman C.Volume:
3891
Year:
1999
Language:
english
DOI:
10.1117/12.364468
File:
PDF, 2.31 MB
english, 1999