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SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Device and Process Technologies for MEMS and Microelectronics - Dry release process of anhydrous HF gas-phase etching for the fabrication of a vibrating microgyroscope
Jang, Won-Ick, Choi, Chang-Auck, Hong, Yoonshik, Jun, Chi-Hoon, Kim, Youn Tae, Lee, Jong-Hyun, Chau, Kevin H., Dimitrijev, SimaVolume:
3892
Year:
1999
Language:
english
DOI:
10.1117/12.364477
File:
PDF, 1.55 MB
english, 1999