SPIE Proceedings [SPIE SPIE's International Symposium on Optical Science, Engineering, and Instrumentation - Denver, CO (Sunday 18 July 1999)] EUV, X-Ray, and Neutron Optics and Sources - Lifetime studies of Mo/Si and Mo/Be multilayer coatings for extreme ultraviolet lithography
Wedowski, Marco, Bajt, Sasa, Folta, James A., Gullikson, Eric M., Kleineberg, Ulf, Klebanoff, Leonard E., Malinowski, Michael E., Clift, W. Miles, MacDonald, Carolyn A., Goldberg, Kenneth A., MaldonadVolume:
3767
Year:
1999
Language:
english
DOI:
10.1117/12.371120
File:
PDF, 475 KB
english, 1999