SPIE Proceedings [SPIE SPIE's 7th Annual International Symposium on Smart Structures and Materials - Newport Beach, CA (Monday 6 March 2000)] Smart Structures and Materials 2000: Smart Electronics and MEMS - New technique for direct integration of mechanical motion with electronics on a chip
Ajmera, Pratul K., Wang, Xiaodong, Ross, James, Nallapati, Giri, Manohara, Harish M., Varadan, Vijay K.Volume:
3990
Year:
2000
Language:
english
DOI:
10.1117/12.388904
File:
PDF, 2.11 MB
english, 2000