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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachined Devices and Components VI - Microresonator modified as magnetic sensor
Lokhre, S. G., Apte, Prakash R., Raajeev, R., Lal, R., Peeters, Eric, Paul, OliverVolume:
4176
Year:
2000
Language:
english
DOI:
10.1117/12.395645
File:
PDF, 1.36 MB
english, 2000