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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] MOEMS and Miniaturized Systems - Status of the development of a 128x128 microshutter array
Moseley, Jr., Samuel H., Fettig, Rainer K., Kutyrev, Alexander S., Li, Mary J., Mott, David B., Woodgate, Bruce E., Motamedi, M. Edward, Goering, RolfVolume:
4178
Year:
2000
Language:
english
DOI:
10.1117/12.396500
File:
PDF, 1.63 MB
english, 2000