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SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] MEMS Design, Fabrication, Characterization, and Packaging - Low-cost in-line phase shifter (IPS) using electrostatic MEMS for large antenna arrays
Kim, Seong-Hwoon, Dean, Jeff, Kramer, Leslie D., Behringer, Uwe F. W., Uttamchandani, Deepak G.Volume:
4407
Year:
2001
Language:
english
DOI:
10.1117/12.425309
File:
PDF, 2.42 MB
english, 2001